Advanced Metallization Conference 2021
30thAnniversary, Asian Session
Chapter 1:
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Takashi Yoda, Tokyo Institute of Technology Thinking about the " Immutable and Changeable". Congratulations to ADMETA on its 30th anniversary. I would like to express my sincere gratitude to the organizers who have supported the conference activities up to this point and to the participants who have enlivened the discussions. Amid the struggle for hegemony between the U.S. and China, the semiconductor industry is once again in the spotlight in our country. The book "Techno-Hegemony" by Taizo Yakushiji, published about 30 years ago at about the same time as the birth of ADMETA, says, "Nations rise and fall on technology. Since a nation secures its security through technology, technology is significantly involved in its hegemony in the international system, which is expanding to economic security these days, and it is also a prophetic statement. Now, let me return to the main topic. " Immutable and Changeable ", is one of the principles of haiku (a form of haiku) advocated by Matsuo Basho, a haiku poet of the Edo period. He said that there are two types of things: "Immutable" things that do not change no matter how much the times change, and "Changeable" things that change with the flow of the world and must be changed. There was a time when the theory that a company's life span was 30 years was discussed, and it is said that a company goes through a period of establishment, growth, maturity, and decline. What is the secret of a company's 100-year existence? It is said that it is important to have a balanced awareness of both "Immutable and Changeable." In order to respond to the ADMETA, I would like to list the following: "Immutable": a fundamental approach rooted in physical chemistry, multifaceted consideration, knowledge sharing/sympathy with the public, private, and academic sectors, an open and flat discussion forum that includes business smells, a low threshold, and resilient conference management. Now, what about " Changeable"? I am sure there are various opinions, but it is not easy to steer the ship, and there must be some things that cannot survive unless they are changed. This is the first part of the "Hojoki", which expresses Kamo no Chomei's view of impermanence: "The flow of a wandering river is constant, yet it is not the same as the original water”. It is said that at the cellular level, ninety or so percent of our bodies are replaced in a year. While our bodies are constantly changing at the cellular level, our DNA, which is our body's blueprint, keeps our appearance the same, but what about the inside? On the other hand, it seems like the world has changed in the past 30 years, but it is true that nothing has changed at the bottom, and even if we try to change, we cannot. In a sense, it may be fortunate that we do not change. In a sense, it may be fortunate that we do not change as long as we can survive without changing. ADMETA, as an academic society, seems to be able to steer itself relatively flexibly due to its high metabolism. Can it be changed, but can it be changed drastically? I would like to think about "Changeable thing" with you. The true vein of ore can be found amid the chaos and jumble of stones. Let's keep passing the baton and see what the 40th and 50th anniversaries will bring. I am looking forward to it. |
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Chairperson of 2009 ADMETA, Vice-Dean, School of Engineering, Professor, Department of Materials Engineering, The University of Tokyo First of all, I would like to congratulate ADMETA on its 30th anniversary. I want to express my gratitude to all of you who have worked so hard to make this conference possible, and I look forward to its further development. I first became involved with ADMETA in 1993. There was a discussion that Advanced Metallization Conference (AMC), which was held in the U.S., should be held in Japan as well. So the first one was held at Tokyo Institute of Technology in 1991. Before that, in 1989, Dr. Katsuro Sugawara, who was the chief engineer of Hitachi, Ltd. and a professor at Nihon University, held a one-day tungsten workshop at the Centennial Hall of Tokyo Institute of Technology. The workshop was held once every two years, and Prof. Horiike was the chairman in 1993. Looking back in my memory, I remember a rental conference room called Island Hall near Hamamatsucho, where we had a meeting. In 1986, the University of Tokyo's Sanjo Kaikan was rebuilt and had a large conference room equipped with a simultaneous interpretation system, so we decided to hold the conference there. Prof. Horiike also suggested that we hold the next meeting in 1995, also at the University of Tokyo, with Prof. Hiroshi Komiyama (my supervisor) as the chairman. At this stage, I think the use of Sanjo Kaikan as the venue became firmly established. We worked as volunteers, so the 1993 and 1995 meetings required many days and nights of near-overnight work to prepare. However, we managed to hold the conference successfully, with the generous support of the companies in the interconnect field. Although the number of people involved in interconnect technology has decreased, and the conference's content has become much broader, I hope that active exchange of opinions will take place beyond the boundaries of companies and universities. I also expect that ADMETA attendees will promote various industry-university collaborations based on these mutual discussions. |
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Kazuyoshi Ueno, Department of Electronic Engineering, College of Engineering, Shibaura Institute of Technology Congratulations on the 30th anniversary of ADMETA Plus 2021. Just ten years ago, in 2011, I chaired the 21st ADMETA Plus 2011. At that time, ADMETA was traditionally held at the Hongo campus of the University of Tokyo. However, ADMETA Plus 2011 was held at the newly established Shibaura Institute of Technology in Toyosu. This year's ADMETA Plus will be the 30th anniversary, and also I have been involved in research on metallization technology for 30 years, and it is impressive for me. ADMETA has become the center of the metallization community in Japan as a sister conference of AMC held in the United States. In addition, the proceedings published annually with AMC was called "red book" and became a must-have document for metallization researchers. Unfortunately, the red book has no longer been published. However, a special issue of JJAP has been published every year, providing an essential place for presentations for metallization researchers, especially researchers belonging to academia like myself. Since 2011, ADMETA was also held in Seoul, South Korea, Beijing, China, and the active research and development of metallization technology in the Asian region. Committee members have traditionally run ADMETA from industries, research institutes, and academia. Moreover, there has been much communication under the leadership of unique and passionate committee members (including alumni) not only in the conferences and committee meetings, I think that the role they have played in the development of both the metallization technology and human resources is immeasurable. In addition, the Tutorial lectures conducted in Japanese are a valuable place for engineers and researchers who are newly joining the metallization field to obtain basic knowledge and information on the latest trends. I met many wonderful people at ADMETA, enjoyed together, and received their valuable guidance and inspiration. Thanks entirely to ADMETA, I have continued my research in this field for 30 years. I sincerely hope that ADMETA Plus will continue to grow so that more people, especially young people, can take advantage of this precious space to grow and lead to technological advances. I also hope that I can continue to contribute to ADMETA in the future. |
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Osamu Nakatsuka, Nagoya University In the 2010s, the committee members of ADMETA Asian Session began to discuss the possibility to expand not only the conference scope of the conference but also the venues in other countries, especially to Asia, in order to enhance the visibility of ADMETA abroad and to improve the number of submitted papers and participants. In 2015, ADMETA2015 was held in Seoul, Korea outside Japan for the first time, and also we received an active offer of cooperation from researchers in China as the next overseas venue. Discussions about holding the conference in China began after ADMETA2015 in Korea. After 3 years of negotiations and preparations, ADMETA2018 was the first to be held in China. In the previous year’s ADMETA2017 (October 18-20, 2017, University of Tokyo), Dr. Jun Luo (Chinese Academy of Sciences) gave his invited talk and also some regular talks were presented from China. The decision to hold the conference in China was made at the committee meeting held during the ADMETA2017 conference. After that, while exchanging information and opinions via e-mail, teleconferences were held with the Japanese side in February and April 2018 to exchange opinions on the details of the conference and the call for papers. Dr. Xun Gu (then of SanDisk Limited, now of ASM Japan), who has been a member of ADMETA since 2015, made his kind efforts as a bridge between Japan and China, and we were able to maintain smooth communication and cooperation before and after the conference. In planning and holding the conference in a new overseas location, it is essential to have the cooperation and contribution of members who are familiar with ADMETA and the local situation. We would like to express our appreciation again to Dr. Gu and the local committee members for their efforts and hospitality. ADMETA2018 was held on October 10-12 in 2018 at the Beijing International Convention Center, near the Olympic site (nicknamed Bird's Nest) in Beijing, China. The tutorial was held on October 10, 2018, and the main conference was held on October 11-12. ADMETA2018 was held as a joint conference with the 3rd International Workshop “Materials for Advanced Interconnects and Packaging (MAIP)”. In addition to the ADMETA committee, Chinese Academy of Science, North China University of Technology, ICTIA (Integrated Circuit Industry Technology Innovation Alliance) and ICMtia (Integrated Circuit Materials and Components Industry Technology Innovation Alliance) joined as conference organizers. Also, Platinum/Gold/Silver sponsors from 10 companies in China and abroad joined, and the conference committees actively promoted and recruited participants. The General Chair of ADMETA2018 was Dr. Tian-chun Ye (Chinese Academy of Science) and the General Co-chair was Dr. Chao Zhao (Chinese Academy of Science). Prof. Mikhail Baklanov (North China University of Technology) served as Program Chair, Prof. Jim Leu (National Chiao Tung University) as Program Co-chair, and Dr. Xun Gu (SanDisk Limited) as Tutorial Chair. The 13 members of Progrem Committee included 8 members from Japan, who supported the call for papers and the organization of the conference. The conference followed the format of the Japanese conference, with the tutorials in English on the first day and the plenary sessions on the second and third days. The poster session was held in the evening of the first day of the conference, and some parallel sessions were held on the last day, in which about 120 tutorial participants and about 100 main conference participants discussed. Before the poster session, a panel discussion entitled “Enabling technologies and challenges in interconnects for 5 nm node and beyond” was planned. 2 keynote lectures, 7 tutorial lectures, and 15 invited lectures were held, and 23 regular talks and 42 poster presentations were contributed. During the conference, the exchange of opinions for the future of ADMETA was actively carried out in the Program Committee meeting on the second day of the conference and the Committee members’ reception in the evening. The special issue of the ADMETA2018 conference was published thorough Japanese Journal of Applied Physics (JJAP), in which the Chinese Committee members participated in the editorial work. 14 papers were accepted and published in July 2019, and 11 papers of them were submitted from China, thus achieving the goal of expanding the scope and the call for papers to overseas and Asian countries. |
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