[Conference Plenary Speakers] Dr. Akihisa Sekiguchi (Tokyo Electron Ltd.) Dr. Eric Beyne (IMEC) [Invited Speakers (Organized Session)] 1) Advanced Integration and Processes Dr. Jonathan Reid (Lam Research Co., Ltd.) 2) Advanced Metallization Dr. David M.Thompson (Applied Materials, Inc.) Prof. Gregory N. Parsons (NC State University) 3) CMP Dr. Manabu Tsujimura (Ebara Corp.) Dr. Chao-Chang Arthur Chen (National Taiwan University of Science & Technology, NTUST) 4) Emerging Technology Prof. Shi-Li Zhang (Uppsala University, Sweden) Dr. Huiming Bu (IBM Research) Prof. Qing-Tai Zhao (Forschungszentrum Jülich) 5) Thin films and dielectrics Dr. Sean King (Intel Corp.) 6) 3D, TSV, PKG Prof. Chih Chen (National Yang Ming Chiao Tung University) Prof. Tadahiro Kuroda (The University of Tokyo) |