go to Japanese page
 Information
 About ADMETAPlus 2017
 Important Dates
 Travel
 Topics
 Call for Papers
 Special issu of JJAP
 Invited Speaker
 Tutorial
 Conference Program
 Oral Presentation
 Poster Presentation
 Registration
 Committee
 Contact
 Top Page
 
Advanced Metallization Conference 2017
27th Asian Session
 Conference Invited Speakers

Conference Plenary Speaker:
1) Transforming Industries through Cognitive
Tamiya Onodera (IBM Research Tokyo)

2) Conductor trends for future interconnects
Zsolt Tokei (imec)

Conference Invited Speaker
1) Advanced Silicide/Germanide technology for sub-16/14 nm node devices
Jun Luo (Chinese Academy of Sciences)

2) Non-destructive Evaluation of Adhesion Property for Low-k Films Using Surface Acoustic Waves
Xia Xiao (Tianjin University)

3) Through-cobalt self-forming barrier copper interconnect and alternative conductor interconnects of cobalt and ruthenium for 7nm BEOL and beyond
Takeshi Nogami (IBM T. J. Watson Research Center)

4) A prospect of metallization technology for future interconnects
Atsunobu Isobayashi (Toshiba)

5) Dielectric Atomic Layer Etching in high volume semiconductor manufacturing: Why now and how?
Gerardo Delgadino (Lam Research)

6) Selective atomic-level etching using two heating procedures, infrared irradiation, and ion bombardment, for next-generation semiconductor device manufacturing
Nobuya Miyoshi (Hitachi)

7) Tungsten CMP as Enabling Process for 14nm Transistor Scaling and Yield Enhancement
Hong Jin Kim (Globalfoundries)

8) Incorporate Graphene into Back End-of-Line for Better Cu Interconnects
Ling Li (Stanford University)

9) Robust nanoscale Cu interconnects coated by atomic-layer materials
Nguyen Thanh Cuong (NIMS)

10) The Critical Role and Application of Metallization Processes in Advanced Packaging
Rozalia Beica (Dow Chemical)

11) Challenges with join & interface integrity in next generation microelectronic packages
Vivek B. Dutta (EMD Performance Materials)

12) Chalcogenide superlattices for the next generation non-volatile memory
Junji Tominaga (AIST)

 
 

(C) ADMETA Plus 2017 all rights reserved.