| |
Plenary Speaker:
Manabu Tsujimura, Ebara Corp.
Tutorial Presenters:
Takeshi Nogami, IBM Research
Takashi Hayakawa, Tokyo Electron Ltd.
Koji Hamada, Micron Memory Japan
Kazuo Nojiri, Nanotech Reseach
Yukiteru Matsui, Kioxia Corp.
Yukihiro Shimogaki, The Univ. of Tokyo
Tetsu Tanaka, Tohoku Univ.
Toshihiko Nishio, SBR Technology
The detail program is in the Japanese page.
|
|
