Advanced Metallization Conference 2021
30thAnniversary, Asian Session
Chapter 1:
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 Takayuki Ohba, Graduate School of Engineering, The University of Tokyo Congratulations on the 20th anniversary of ADMETA, which is different from the one sponsored by a pure academic society. It is a result of the enthusiasm of the organizers and participants, in addition to the mutual efforts and support. I am glad that I continued with this conference name because it has been established worldwide as “ADMETA” (without accents). I also think that this is a major reason as to why the organization’s management system with good metabolism does not become chronic. Looking back, along with the transistor performance, the push up to the wiring became severe, whereas the wiring process accounted for 70% of the entire process, so it became significantly difficult from the viewpoint of cost competition. Consequently, new processes, materials, and analysis methods have been developed, and the equipment is closer to the ideal configuration. I think that the spillover to these various fields has expanded the base of ADMETA participants. In 20 years, the business environment surrounding semiconductors has changed considerably. Although it has changed, the signal lines will not disappear, and more diverse needs are expected owing to the trend towards the ultra-miniaturization of electronic devices. The next decade will be an era in which wiring technology fabricated on the wafer surface for the past 20 years will be widely applied. I feel that the reliability of Made in Japan and the expectations for Brand are still strong overseas. Although it is a small part of the Made in Japan technology, please take the leadership from ADMETA to Asia and the world to fulfill such high expectations. We are looking forward to the next 2017. |
 Nobuyoshi Kobayashi, Japan ASM Co., Ltd I first joined the ADMETA in 1988. I remember that Japan was in great shape in both the semiconductor business and research activities, and it started with a request from the United States to learn about Japanese activities. Around this time, ADMETA used tungsten-selective CVD, which is the pioneer of metal CVD, as topics, and subsequently the elite of the process (powerful personality?) gathered and had a prominent discussion. Consequently, selective CVD was unsuccessful. However, I am grateful that for 20 years the people who discussed tungsten at that time are in important positions not only in device manufacturing industries but also in the current workplace. I think that it also contributes to the expansion of horizontal connections between engineers in Japan. Certainly, in the 20 years there have been many experiences. From the latter half of the 1990s, the number of participants gradually decreased due to the retreat of Japanese semiconductors, and a pinch came. Supported by the activities of equipment and material manufacturers, I think that the position of a wiring specialist society in Japan is now permanent. From now on, we should consider the following scope of the academic society. Copper wiring is being renewed in the United States, and its research is gradually maturing. I want domestic manufacturers to become slightly more active in new processes and accelerate the development of new technologies that are particularly important in the transitional period of scaling, which is coming to an end. It would be great if the society could support research activities related to 3D mounting, next-generation metal embedding, barriers, and new materials. If you have a dream and have excellent technical proposals, I believe that several people associated with overseas equipment and material manufacturers will come together. Moreover, I have an urge to realize my dreams. In particular, it would be great if we could grow into an academic society that could exchange information in the Asian region. |
 Kazuya Masu, Tokyo Institute of Technology My first presentation at AMDETA was 1993 meeting (Chairman: Prof. Yasuhiro Horiike). Thereafter, I participated AMC at Austin in 1994, and since then, I have been involved every year. In the 1990s, I was at Tohoku University and was involved in Al-CVD technology in Prof. Tsubouchi's group (Prof. Tsubuchi served as ADMETA Chairman in 1996 and 1997.). Through ADMETA, I have learned a lot from discussions with Drs. Nobuyoshi Kobayashi and Takayuki Ohba, and Professor Shigeaki Zaima. In 2000, I moved to the Tokyo Institute of Technology and my research focus has been also moved to circuit design. However, since some research involves signal transmission in interconnect, I have been participating ADMETA. At ADMETA, I served as the Vice-Chairman in 2003 and Chairman in 2004. When we manage an academic conference, one of the most important questions we have to ask ourselves is who are the stakeholders of the conference. When we discussed whether or not to have a tutorial on ADMETA in 1995 or 1996, Dr Masahiro Kashiwagi who was enrolled in the equipment manufacturer at that time made an impressive comment. Since the engineers of equipment manufacturers have less opportunities to attend the JSAP (the Japan Society of Applied Physics) meetings and other conferences, they inevitably lack the basic science and technological knowledge and neglect them. So that the tutorials at ADMETA must be especially significant for engineers of equipment manufacturers. This comment left a deep impression on me. After that, I investigated what kind of people were participating in ADMETA. Engineers of device manufactures are participating and presenting their achievements. Some of papers are from equipment manufactures and/or material companies. Important is many participants are from these equipment manufactures and/or material companies. I strongly recognized that ADMETA's raison d'etre is to improve the satisfaction of those who participate (stakeholders). In the management of many conferences/meetings and academic societies, their survival seems to become main objective. We should not forget the most fundamental, which is for whom and for what purpose the conferences and academic societies are being managed. ADMETA should be continued as a conference that considers the interests of the presenters and participants, not just the survival. I hope that ADMETA will contribute and make impact on interconnect technology and related technologies, and the developments of this field in Japan. I would like to continue to support ADMETA. |
 Manabu Tsujimura, Ebara Corporation In the late 1990s, a revolution occurred in the interconnect technology. This was the damascene process. Subsequently, lower dielectric constants called for a new revolution, and the interconnect technology of the 2000s involved devices and materials. Then the storm of the device manufacturing technology revolution peaked. With the end of device scaling, semiconductor researchers and developers began to place importance on reviewing research and development from the basics, returning to the 1950s. Therefore, I think that ADMETA in 2005 submitted more papers that emphasized basic research and development. Back to the Teacher for the Future! ADMETA plays a part in the interconnect technology of the future. Reflecting such circumstances, the 15th ADMETA 2005 International Conference was held at the Sanjo Conference Hall of the University of Tokyo for three days, from October 12 to 14, 2005. The number of treatises was two keynote speeches, six invited treatises, 25 oral treatises, and 30 posters. I think it was a year in which we were able to exhibit further innovations in interconnect technologies such as Co metal caps and CuMn for 3D mounting and EM improvement, in addition to integration using Cu-Low k following the previous year. This year, there was also a considerable change in the ADMETA committee. The secretariat, which had been in charge until then, was replaced, and the committee system, which relied heavily on the secretariat, was renewed. I think it can be called the year of the ‘beginning of the second term of Genesis,’ in which the members made a constitution and vowed to contribute to the development of ADMETA. The number of members has increased, and donations have become slightly more abundant, which fulfilled the idea of this commemorative magazine possible. It is well known that semiconductors will continue to evolve while experiencing twists and turns. Moreover, ADMETA, which supports multi-layer wiring, is forever immortal. |
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