Advanced Metallization Conference 2021
30thAnniversary, Asian Session


招待講演者
[Conference Plenary Speakers]
   Dr. Akihisa Sekiguchi (Tokyo Electron Ltd.)
  Dr. Eric Beyne (IMEC)

[Invited Speakers]
 1) Advanced Integration and Processes
  Dr. Jonathan Reid (Lam Research Co., Ltd.)

2) Advanced Metallization
  Dr. David M.Thompson (Applied Materials, Inc.)
  Prof. Gregory N. Parsons (NC State University)

3) CMP
  Dr. Manabu Tsujimura (Ebara Corp.)
  Dr. Chao-Chang Arthur Chen (National Taiwan University of Science & Technology, NTUST)

4) Emerging Technology
  Prof. Shi-Li Zhang (Uppsala University, Sweden)
  Dr. Huiming Bu (IBM Research)
  Prof. Qing-Tai Zhao (Forschungszentrum Jülich)

5) Thin films and dielectrics
  Dr. Sean King (Intel Corp.)

6) 3D, TSV, PKG
  Prof. Chih Chen (National Yang Ming Chiao Tung University)
  Prof. Tadahiro Kuroda (The University of Tokyo)


特定商取引法に基づく表記